A CAPACITIVE-TYPE HUMIDITY SENSOR USING CROSS-LINKED POLY(METHYL METHACRYLATE) THIN-FILMS

被引：57

作者：

MATSUGUCHI, M ^{[1
]}

SADAOKA, Y ^{[1
]}

SAKAI, Y ^{[1
]}

KUROIWA, T ^{[1
]}

ITO, A ^{[1
]}

机构：

[1] YAMATAKE HONEYWELL CO LTD,FUJISAWA FACTORY,FUJISAWA,KANAGAWA 251,JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1991年 / 138卷 / 06期

关键词：

D O I：

10.1149/1.2085886

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

A capacitive-type humidity sensor was prepared using cross-linked poly(methyl methacrylate) (PMMA). The electrical capacitance changed linearly with the relative humidity over the range of 10-90% RH and the sensitivity (the ratio of capacitance at 90% RH to that at 10% RH) was about 1.13. The amount of sorbed water on PMMA at 90% RH was 25 mg/g which was one-third of that on cellulose acetate butyrate. This low hygroscopicity of PMMA was effective in reducing any hysteresis. The decrement of temperature coefficient and high durability for acetone vapor were achieved using the cross-linked PMMA film with divinyl benzene or ethylene glycol dimethacrylate as the cross-linking agent.

引用

页码：1862 / 1865

页数：4

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