OPTICAL CHARACTERIZATION OF UNDOPED A-SI-H PREPARED BY PHOTO-CVD AND GD TECHNIQUES

被引:5
作者
KAWASAKI, S [1 ]
SATO, K [1 ]
SUZUKI, K [1 ]
TAKEUCHI, H [1 ]
KUROIWA, K [1 ]
TARUI, Y [1 ]
机构
[1] TOKYO UNIV AGR & TECHNOL,FAC TECHNOL,KOGANEI,TOKYO 184,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 09期
关键词
D O I
10.1143/JJAP.26.1400
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1400 / 1403
页数:4
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