HIGH-Q MICROWAVE ACOUSTIC RESONATORS AND FILTERS

被引：259

作者：

LAKIN, KM

KLINE, GR

MCCARRON, KT

机构：

[1] TFR Technologies, Inc., Redmond, OR

来源：

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 1993年 / 41卷 / 12期

关键词：

D O I：

10.1109/22.260698

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents recent experimental results and modeling obtained on high-Q microwave acoustic resonators and filters for use in oscillators and other frequency control applications. Overmoded resonators have exhibited an FQ greater than 1 x 10(14) Hz (e.g., Q = 68 000 at 1.6 GHz) with a strong inductive response suitable for one-port and two-port oscillator feedback circuits. Ladder filters fabricated with overmoded resonators have loaded Q's greater than 40 000 with 76 kHz bandwidth at 1.6 GHz. Aluminum nitride films were used for longitudinal transduction on Z-cut sapphire and lithium niobate substrates.

引用

页码：2139 / 2146

页数：8

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