STRUCTURE AND ELECTRICAL-PROPERTIES OF TITANIUM NITRIDE FILMS

被引：61

作者：

IGASAKI, Y

MITSUHASHI, H

AZUMA, K

MUTO, T

机构：

来源：

关键词：

D O I：

10.1143/JJAP.17.85

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：85 / 96

页数：12

共 19 条

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