TRANSMISSION ELECTRON-MICROSCOPE INVESTIGATIONS OF DEFECTS PRODUCED BY INDIVIDUAL DISPLACEMENT CASCADES IN SI AND GE

被引：11

作者：

RUAULT, MO ^{[1
]}

JAGER, W ^{[1
]}

机构：

[1] ARGONNE NATL LAB,DIV MAT SCI,ARGONNE,IL 60439

来源：

JOURNAL OF MICROSCOPY-OXFORD | 1980年 / 118卷 / JAN期

关键词：

D O I：

10.1111/j.1365-2818.1980.tb00247.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：67 / 73

页数：7

共 12 条

[1]

CARTER G, 1978, RADIAT EFF DEFECT S, V36, P1, DOI 10.1080/00337577808233164

[2] RADIATION-DAMAGE IN SILICON PRODUCED BY PHOSPHORUS IMPLANTATION - RANDOM AND ALIGNED IMPLANTS [J].

CEMBALI, F ;

DORI, L ;

GALLONI, R ;

SERVIDORI, M ;

ZIGNANI, F .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 36 (1-2) :111-117

[3]

JAGER W, UNPUBLISHED

[4] CONTRAST OF DYNAMICAL IMAGES OF SMALL LATTICE-DEFECTS IN ELECTRON-MICROSCOPE [J].

KATERBAU, KH .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1976, 38 (02) :463-476

[5]

MATTHEWS MD, 1971, RADIAT EFF, V11, P167

[6] OBSERVATION OF ION BOMBARDMENT DAMAGE IN SILICON [J].

MAZEY, DJ ;

NELSON, RS ;

BARNES, RS .

PHILOSOPHICAL MAGAZINE, 1968, 17 (150) :1145-&

[7]

MITCHELL JB, 1975, ION IMPLANTATION SEM, P493

[8] ENERGY DENSITY AND TIME CONSTANT OF HEAVY-ION INDUCED ELASTIC-COLLISION SPIKES IN SOLIDS [J].

SIGMUND, P .

APPLIED PHYSICS LETTERS, 1974, 25 (03) :169-171

[9] ENERGY SPIKES IN SI AND GE DUE TO HEAVY-ION BOMBARDMENT [J].

THOMPSON, DA ;

WALKER, RS .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 36 (1-2) :91-100

[10]

WILKENS M, 1969, VACANCIES INTERSTIT, P485

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