SURFACE, INTERFACE, AND BULK PROPERTIES OF AMORPHOUS-CARBON FILMS CHARACTERIZED BY INSITU ELLIPSOMETRY

被引：10

作者：

COLLINS, RW

机构：

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 24期

关键词：

D O I：

10.1063/1.99570

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2025 / 2027

页数：3

共 13 条

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[7]

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[9] CHEMICALLY BONDED DIAMOND-LIKE CARBON-FILMS FROM ION-BEAM DEPOSITION [J].

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[10] DUAL-ION-BEAM DEPOSITION OF CARBON-FILMS WITH DIAMOND-LIKE PROPERTIES [J].

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