STRUCTURAL-PROPERTIES OF HIGH-QUALITY SPUTTERED FE FILMS ON AL2O3(11(2)OVER-BAR0) AND MGO(001) SUBSTRATES

被引:22
作者
MUHGE, T [1 ]
STIERLE, A [1 ]
METOKI, N [1 ]
ZABEL, H [1 ]
PIETSCH, U [1 ]
机构
[1] UNIV POTSDAM,FACHBEREICH PHYS,D-14469 POTSDAM,GERMANY
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1994年 / 59卷 / 06期
关键词
D O I
10.1007/BF00331928
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
High-quality thin Fe films were deposited on MgO(001) and Al2O3(11 (2) over bar 0) substrates in the thickness range from 7 to 50 nm. The structural properties have been studied by out-of-plane and in-plane X-ray scattering experiments. From the out-of-plane measurements the electron density profile was determined together with interface and surface roughness parameters. Fe on Al2O3 grows along the [110]-direction with a structural coherence length comprising about the total film thick ness and a very small mosaicity. From in-plane scattering experiments a three-domain structure was observed. On MgO(001) substrates Fe grows in the [001]-direction, with the Fe [100]-axis parallel to the MgO [110]-axis. On both substrates, the Fe films exhibit a very small surface and interface roughness, indicative for a high quality of the sputtered samples.
引用
收藏
页码:659 / 665
页数:7
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