RF DISCHARGE IN THE TRANSVERSE MAGNETIC-FIELD NUMERICAL-MODEL

被引：4

作者：

LUKYANOVA, AV

RAKHIMOV, AT

SUETIN, NV

机构：

[1] Research Institute of Nuclear Physics, Department of Microelectronics, Moscow State University, 1119899, Moscow

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1991年 / 19卷 / 02期

关键词：

D O I：

10.1109/27.106814

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A numerical model of RF discharges in a steady transverse magnetic field is developed. This model is valid in a range of parameters (gas pressure, magnetic field, RF voltage) used in a number of experimental and technical installations. The comparison between numerical calculations and some experimental results is presented.

引用

页码：197 / 203

页数：7

共 14 条

[1]

BOYKO VV, 1988, N86 APPL MATH I SOV

[2]

BOYKO VV, ZH TEKH FIZ

[3]

BROWDIE I, 1982, PHYSICS MICROFABRICA

[4]

DANYLIN BS, 1987, APPLICATION LOW TERM

[5]

DAVYDOV BI, 1937, ZH EKSP TEOR FIZ, V7, P1069

[6]

FRANKKAMENETSKY DA, 1968, LECTURES PLASMA PHYS

[7]

GURIN AA, 1985, FYZ PLAZMY, V11, P244

[8] THE DRIFT VELOCITIES OF MOLECULAR AND ATOMIC IONS IN HELIUM, NEON, AND ARGON [J].

HORNBECK, JA .

PHYSICAL REVIEW, 1951, 84 (04) :615-620

[9] MOMENTUM-TRANSFER CROSS-SECTION FOR ELECTRON-HELIUM COLLISIONS IN RANGE 4-12 EV [J].

MILLOY, HB ;

CROMPTON, RW .

PHYSICAL REVIEW A, 1977, 15 (05) :1847-1850

[10]

NAUMOVETZ VG, 1987, N8725 NUCL RES I UKR

← 1 2 →