STUDIES ON NUCLEATION PROCESS IN DIAMOND CVD - AN OVERVIEW OF RECENT DEVELOPMENTS

This paper presents an updated and systematic overview of the recent developments in studies on nucleation processes in diamond CVD. The nucleation mechanisms are discussed, and the nucleation enhancement methods developed to date are summarized. The effects of surface conditions and deposition parameters on the surface nucleation are described Finally, a brief description of theoretical and modeling studies on the surface nucleation is given.