MEASUREMENT OF THE THICKNESS OF THIN FILMS BY MULTIPLE-BEAM INTERFEROMETRY

被引:13
作者
HEAVENS, OS
机构
来源
PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B | 1951年 / 64卷 / 377期
关键词
D O I
10.1088/0370-1301/64/5/307
中图分类号
Q [生物科学];
学科分类号
07 ; 0710 ; 09 ;
摘要
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页码:419 / 425
页数:7
相关论文
共 10 条
[1]   INTERFEROMETRIC DETERMINATION OF THE APPARENT THICKNESS OF THIN METALLIC FILMS [J].
AVERY, DG .
NATURE, 1949, 163 (4154) :916-916
[2]   MULTIPLE-BEAM LOCALIZED FRINGES .1. INTENSITY DISTRIBUTION AND LOCALIZATION [J].
BROSSEL, J .
PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1947, 59 (332) :224-&
[3]  
COLBERT, 1945, Patent No. 2383469
[4]   A SENSITIVE ADJUSTMENT FOR INTERFEROMETER PLATES [J].
HEAVENS, OS .
JOURNAL OF SCIENTIFIC INSTRUMENTS, 1950, 27 (06) :172-172
[6]   THE THICKNESS MEASUREMENT OF THIN FILMS BY MULTIPLE BEAM INTERFEROMETRY [J].
SCOTT, GD ;
MCLAUCHLAN, TA ;
SENNETT, RS .
JOURNAL OF APPLIED PHYSICS, 1950, 21 (09) :843-846
[7]   THE STRUCTURE OF EVAPORATED METAL FILMS AND THEIR OPTICAL PROPERTIES [J].
SENNETT, RS ;
SCOTT, GD .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1950, 40 (04) :203-211
[8]   TOPOGRAPHY OF THE FACE OF A DIAMOND CRYSTAL [J].
TOLANSKY, S ;
WILCOCK, WL .
NATURE, 1946, 157 (3992) :583-583
[9]  
Tolansky S., 1948, MULTIPLE BEAM INTERF
[10]  
TURNER AF, 1950, J PHYS RADIUM, V11, P449