PITTING OF SPUTTERED ALUMINUM-ALLOY THIN-FILMS

被引:80
作者
FRANKEL, GS
RUSSAK, MA
JAHNES, CV
MIRZAMAANI, M
BRUSIC, VA
机构
关键词
D O I
10.1149/1.2096864
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:1243 / 1244
页数:2
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DAVIS, GD ;
AHEARN, JS ;
HOUGH, HF .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (11) :2677-2684
[3]  
MOSHIER WC, 1987, ONR N0001485C0638 AN
[4]  
YOSHIOKA H, 1987, ELECTROCHEMICAL SOC, V872, P318