MECHANICAL STRENGTH OF OXYGEN-DOPED FLOAT-ZONE SILICON-CRYSTALS

被引:16
作者
SUMINO, K [1 ]
YONENAGA, I [1 ]
YUSA, A [1 ]
机构
[1] KOMATSU ELECTR MET CO LTD, HIRATSUKA, KANAGAWA 254, JAPAN
关键词
D O I
10.1143/JJAP.19.L763
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L763 / L766
页数:4
相关论文
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