EFFECTS OF THE ATMOSPHERE ON THE RESISTANCE OF ITO THIN-FILMS

被引:2
作者
CALDERER, J
机构
[1] Univ Politecnica de Catalunya, Barcelona, Spain, Univ Politecnica de Catalunya, Barcelona, Spain
关键词
GRAIN SIZE - GROWTH TEMPERATURE - INDIUM TIN OXIDE - OXIDIZING ATMOSPHERE;
D O I
10.1016/0042-207X(87)90330-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:441 / 442
页数:2
相关论文
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[2]  
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