DESIGN ANALYSIS OF A NOVEL HOT-ELECTRON MICROBOLOMETER

被引:47
作者
Nahum, M. [1 ,2 ]
Richards, P. L. [1 ,2 ]
Mears, C. A. [3 ]
机构
[1] Univ Calif Berkeley, Dept Phys, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA
[3] Univ Calif Lawrence Livermore Natl Lab, Expt Astrophys Lab, L-401,POB 808, Livermore, CA 94550 USA
关键词
D O I
10.1109/77.233921
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We propose a novel antenna coupled microbolometer which makes use of the weak coupling between electrons and phonons in a metal at low temperatures. The radiation is collected by a planar lithographed antenna and thermalized in a thin metal strip. The resulting temperature rise of the electrons is detected by a tunnel junction, where part of the metal strip forms the normal electrode. All components are deposited directly on a substrate so that arrays can be conveniently produced by conventional lithographic techniques. The active area of the bolometer is thermally decoupled by its small volume, by the thermal resistance between the electrons and phonons in the strip, and by the reflection of quasiparticles at the interface between the strip and the superconducting antenna. Design calculations based on a metal volume of 2x6x0.05 mu m(3) at an operating temperature of T= 100 mK give an NEP approximate to 3x10(-19) WHZ(-1/2) time constant approximate to 10 mu s, and responsivity approximate to 10(9) V/W. The calculated sensitivity is almost two orders of magnitude higher than that of the best available direct detectors of millimeter and submillimeter radiation operated at the same temperature.
引用
收藏
页码:2124 / 2127
页数:4
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