A METHOD FOR DETERMINING THE MASS THICKNESS OF THIN-FILMS USING ELECTRON-PROBE MICROANALYSIS

被引：22

作者：

AUGUST, HJ ^{[1
]}

WERNISCH, J ^{[1
]}

机构：

[1] TECH UNIV WIEN,INST ANGEW & TECH PHYS,KARLSPL 13,A-1030 WIEN,AUSTRIA

来源：

SCANNING | 1987年 / 9卷 / 04期

关键词：

D O I：

10.1002/sca.4950090403

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：145 / 155

页数：11

共 24 条

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[Anonymous], ELECT MICROPROBE

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[4]

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[5] PROSPECTS FOR AN IMPROVED ABSORPTION CORRECTION IN ELECTRON-PROBE MICROANALYSIS [J].

BISHOP, HE .

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[6]

Castaing R, 1960, ADV ELECTRONICS ELEC, V13, P317, DOI [DOI 10.1016/S0065-2539(08)60212-7, 10.1016/S0065-2539(08)60212-7]

[7] COATING THICKNESS MEASUREMENT BY ELECTRON PROBE MICROANALYSIS [J].

COCKETT, GH ;

DAVIS, CD .

BRITISH JOURNAL OF APPLIED PHYSICS, 1963, 14 (11) :813-&

[8] CHARACTERISTIC FLUORESCENCE CORRECTION FOR ELECTRON-PROBE MICROANALYSIS OF THIN COATINGS [J].

COX, MGC ;

LOVE, G ;

SCOTT, VD .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1979, 12 (09) :1441-1451

[9]

Gautschi W., 1965, HDB MATH FUNCTIONS, P295

[10] A STUDY OF ELECTRON BACKSCATTERING OF THIN-FILMS ON SUBSTRATES [J].

HUNGER, HJ ;

ROGASCHEWSKI, S .

SCANNING, 1986, 8 (06) :257-263

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