ALUMINUM-ALLOY METALLIZATION FOR INTEGRATED-CIRCUITS

被引：8

作者：

GHATE, PB

机构：

来源：

THIN SOLID FILMS | 1981年 / 83卷 / 02期

关键词：

D O I：

10.1016/0040-6090(81)90666-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：195 / 205

页数：11

共 12 条

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[6] METALLIZATION IN MICROELECTRONICS [J].

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[9] EVOLUTION AND CURRENT STATUS OF ALUMINUM METALLIZATION [J].

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