DEPOSITION OF CONDUCTING AND TRANSPARENT THIN-FILMS OF INDIUM TIN OXIDE BY REACTIVE ION PLATING

被引：33

作者：

MACHET, J

GUILLE, J

SAULNIER, P

ROBERT, S

机构：

来源：

THIN SOLID FILMS | 1981年 / 80卷 / 1-3期

关键词：

D O I：

10.1016/0040-6090(81)90217-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：149 / 155

页数：7

共 10 条

[1]

ARONSON AJ, 1979, 23RD P SPUTT SCH ARC

[2] LARGE-SCALE SPUTTERING OF INDIUM-TIN OXIDE [J].

GILLERY, FH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02) :306-308

[3] PROPERTIES OF TRANSPARENT CONDUCTING FILMS OF SNO2-SB AND IN2O3-SN DEPOSITED BY HYDROLYSIS [J].

KULASZEWICZ, S ;

LASOCKA, I ;

MICHALSKI, C .

THIN SOLID FILMS, 1978, 55 (02) :283-288

[4] PREPARATION AND PROPERTIES OF REACTIVELY CO-SPUTTERED TRANSPARENT CONDUCTING FILMS [J].

LEHMANN, HW ;

WIDMER, R .

THIN SOLID FILMS, 1975, 27 (02) :359-368

[5] IN2O3-(SN) AND SNO2-(F) FILMS - APPLICATION TO SOLAR-ENERGY CONVERSION .1. PREPARATION AND CHARACTERIZATION [J].

MANIFACIER, JC ;

SZEPESSY, L ;

BRESSE, JF ;

PEROTIN, M ;

STUCK, R .

MATERIALS RESEARCH BULLETIN, 1979, 14 (01) :109-119

[6] CHARACTERIZATION OF TRANSPARENT CONDUCTIVE THIN-FILMS OF INDIUM OXIDE [J].

MOLZEN, WW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :99-102

[7] PREPARATION OF IN2O3 AND TIN-DOPED IN2O3 FILMS BY A NOVEL ACTIVATED REACTIVE EVAPORATION TECHNIQUE [J].

NATH, P ;

BUNSHAH, RF .

THIN SOLID FILMS, 1980, 69 (01) :63-68

[8]

RIDGE MI, 1979, 1979 P C ION PLAT AL

[9] METHOD FOR THE UNIFORM CHEMICAL VAPOR-DEPOSITION OF TIN-DOPED INDIUM SESQUIOXIDE FILMS ON CYLINDRICAL SUBSTRATES [J].

YANNOPOULOS, LN .

JOURNAL OF THE LESS-COMMON METALS, 1979, 63 (01) :111-121

[10]

ZEGA B, 1979, 1979 P INT C ION PLA, P225

← 1 →