CHANGES IN TUNNEL BARRIER PARAMETERS ON INCORPORATION OF REACTIVE SPECIES

被引:6
作者
BELLINGHAM, JR
ADKINS, CJ
PHILLIPS, WA
机构
[1] Cavendish Laboratory, Cambridge, CB3 0HE, Madingley Road
关键词
D O I
10.1016/0040-6090(91)90327-T
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Simultaneous monitoring of both capacitance and resistance during the exposure of tunnel junctions to water vapour is shown to be a powerful technique for studying the infusion doping process. Results depend critically on the metal used for the top electrode and show capacitance increases on exposure to water vapour. Observed changes in both capacitance and resistance can be explained in terms of current ideas about tunnel junction structure.
引用
收藏
页码:85 / 92
页数:8
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