GAS-DISCHARGE ION-SOURCE .3. MODIFIED BERKELEY MULTIFILAMENT ION-SOURCE

被引:5
作者
BICKES, RW
BACON, FM
OHAGAN, JB
机构
关键词
D O I
10.1063/1.1135302
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:1513 / 1517
页数:5
相关论文
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