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CONTROL OF THE VPE LAYER PROPERTIES BY THE CHARACTERISTICS OF THE BOUNDARY-LAYER

被引：7
作者：
DUCHEMIN, JP
BONNET, M
BEUCHET, G
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 05期
关键词：
D O I：
10.1116/1.570173
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1126 / 1129
页数：4
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