A comprehensive timing jitter comparison is made for mode-locked semiconductor lasers using active, passive, and hybrid mode-locking techniques in both external and monolithic cavity configurations. Active mode locking gives the lowest residual rms timing jitter of 65 fs (150 Hz-50 MHz), followed by the hybrid and passive mode-locking techniques. It is found that monolithic cavity devices with all active waveguides have higher timing jitter levels than the comparable external cavity case.