COMPARISON OF THE SYNCHROTRON RADIATION-INDUCED GAS DESORPTION IN ALUMINUM VACUUM CHAMBERS AFTER CHEMICAL AND ARGON GLOW-DISCHARGE CLEANING

被引:7
作者
MATHEWSON, AG
ALGE, E
GROBNER, O
SOUCHET, R
STRUBIN, P
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词
D O I
10.1116/1.574409
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:2512 / 2515
页数:4
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