VACUUM APPLICATIONS OF QUARTZ CRYSTAL MICROBALANCE

被引：4

作者：

BAKER, MA

机构：

[1] Central Research Laboratory, Edwards High Vacuum International Limited, Crawley, Sussex, Manor Royal

来源：

VACUUM | 1969年 / 19卷 / 07期

关键词：

D O I：

10.1016/S0042-207X(69)80046-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The oscillating quartz crystal microbalance is well established as a film thickness monitoring instrument. However there are a number of other interesting vacuum applications of the quartz crystal microbalance. Among those considered are the measurement of oil vapour contamination from vacuum pumps, the measurement of the condensation rates of cryopumped gases, and the measurement of the partial pressure of water vapour in vacuum drying processes. Also considered are the microbalance accuracy of weighing and sources of error applicable to these measurements. © 1969.

引用

页码：327 / &