INFLUENCE OF ION-IMPLANTATION ON THE PROPERTIES OF POLYMER-FILMS

被引:3
作者
AZARKO, II [1 ]
KARPOVICH, IA [1 ]
KOZLOV, IP [1 ]
KOZLOVA, EI [1 ]
ODZHAEV, VB [1 ]
POPOK, VN [1 ]
HNATOWICZ, V [1 ]
机构
[1] ACAD SCI CZECH REPUBL, INST NUCL PHYS, CR-25068 PRAGUE, CZECH REPUBLIC
关键词
POLYMERS; ELECTRON PARAMAGNETIC RESONANCE;
D O I
10.1016/0038-1098(95)00905-1
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The effects of ion implantation on the electrical properties were studied on several types of polymer films implanted with B+ and N+ ions. The EPR measurements indicate creation of paramagnetic centers in the ion implanted polymers. The resistivity of polymer films decreases down to 1 Omega cm with the increasing of the ion implantation dose. The capacitance and the Q-factor depend on the polymer type, current frequency, and external bias voltage.
引用
收藏
页码:49 / 51
页数:3
相关论文
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