DETECTION OF SULFUR DIMERS IN SF6 AND SF6/O2 PLASMA-ETCHING DISCHARGES

被引：12

作者：

GREENBERG, KE

HARGIS, PJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 14期

关键词：

D O I：

10.1063/1.101404

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1374 / 1376

页数：3

共 19 条

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[10] TIME RESOLVED STUDY OF THE B3-SIGMA-U- AND B''3-PI-U STATES OF DIATOMIC SULFUR IN A SUPERSONIC FREE JET [J].

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