Measuring humidity in a gas atmosphere is in itself a difficult task. The difficulties of measurement add to the inherent difficulties of the different sensor systems proposed in the market. At temperatures above 100 degree C though, only a few sensors are available to meet industrial demand. The different sensor principles that are feasible are reviewed. A new sensor, based on the capacitive measurement of the dielectric constant of water vapor, promises to be suitable for new measurement applications. Its characteristics are described.