ELECTRON-SCATTERING IN THE KEV AND SUB-KEV RANGE

The anomalous electron backscattering in sub-keV energy region requires a special treatment of elastic and inelastic electron scattering. Partial wave cross-sections are approached by a fit formula; core ionization and secondary electron creation as well as dielectric energy losses with corresponding momentum changes are taken into consideration. The set-up Monte Carlo programme TRACER provides angular and energy distribution as well as total fraction of backscattered electrons for elements and compounds in a large energy range.