THERMAL TRANSPIRATION ERROR IN ABSOLUTE PRESSURE MEASUREMENT WITH CAPACITANCE MANOMETERS

被引：19

作者：

BALDWIN, GC ^{[1
]}

GAERTTNER, MR ^{[1
]}

机构：

[1] RENSSELAER POLYTECH INST, TROY, NY 12181 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 01期

关键词：

D O I：

10.1116/1.1317944

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：215 / 217

页数：3

共 11 条

[1] TIME-OF-FLIGHT ELECTRON VELOCITY SPECTROMETER
BALDWIN, GC
FRIEDMAN, SI
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1967, 38 (04) : 519 - &
[2] BALDWIN GC, 1972, ELECTRON SPECTROSCOP
[3] THERMAL TRANSPIRATION - APPLICATION OF LIANGS EQUATION
BENNETT, MJ
TOMPKINS, FC
[J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1957, 53 (02): : 185 - 192
[4] ACCURATE PRESSURE MEASUREMENTS IN REGION 0.1-1000 MTORR - INTERCALIBRATION OF 2 MCLEOD GAUGES AND A CAPACITANCE MANOMETER
BROMBERG, JP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (05): : 801 - &
[5] DUSHMAN S, 1962, SCIENTIFIC FOUNDATIO
[6] A STUDY OF THERMAL TRANSPIRATION USING ULTRAHIGH-VACUUM TECHNIQUES
EDMONDS, T
HOBSON, JP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1965, 2 (04): : 182 - &
[7] PRECISE PRESSURE MEASUREMENT IN RANGE 0.1-500 TORR
GASCOIGNE, J
[J]. VACUUM, 1971, 21 (1-2) : 21 - +
[8] KENNARD EH, 1938, KINETIC THEORY GASES, P66
[9] RELIABLE SUBMICRON PRESSURE READINGS WITH CAPACITANCE MANOMETER
UTTERBACK, NG
GRIFFITH, T
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1966, 37 (07) : 866 - +
[10] THERMAL TRANSPIRATION - A CONTINUUM GASDYNAMICS VIEW
WILLIAMS, JC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (02): : 446 - &