MECHANICAL-PROPERTIES (HARDNESS AND ADHESION) OF A-C-H THIN-FILMS PRODUCED BY DUAL ION-BEAM SPUTTERING

被引：13

作者：

SCAGLIONE, S

EMILIANI, G

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.575932

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2303 / 2306

页数：4

共 14 条

[1]

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BURNETT, PJ ;

RICKERBY, DS .

THIN SOLID FILMS, 1987, 148 (01) :51-65

[3] THE MECHANICAL-PROPERTIES OF WEAR-RESISTANT COATINGS .1. MODELING OF HARDNESS BEHAVIOR [J].

BURNETT, PJ ;

RICKERBY, DS .

THIN SOLID FILMS, 1987, 148 (01) :41-50

[4] PROPERTIES OF SILICON AND ALUMINUM-OXIDE THIN-FILMS DEPOSITED BY DUAL ION-BEAM SPUTTERING [J].

EMILIANI, G ;

SCAGLIONE, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :1824-1827

[5] HARDNESS MEASUREMENTS OF THIN-FILMS [J].

JONSSON, B ;

HOGMARK, S .

THIN SOLID FILMS, 1984, 114 (03) :257-269

[6] ENERGY-DEPENDENCE OF THE STRESS IN DIAMOND-LIKE CARBON-FILMS [J].

NIR, D .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2954-2955

[7]

NIR D, 1987, AMORPHOUS HYDROGENAT, V17, P313

[8]

PULKER HK, 1984, COATING GLASS, P353

[9] REACTIVE DUAL ION-BEAM SPUTTERING OF OXIDE-FILMS [J].

SCAGLIONE, S ;

EMILIANI, G .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2702-2703

[10]

SOU, 1984, 10 KOMPL MOTSTNDSF

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