HYDROGENATED CRYSTALLINE SILICON FABRICATED AT LOW-SUBSTRATE TEMPERATURES BY REACTIVE SPUTTERING IN HE-H2 ATMOSPHERE

被引：40

作者：

IMURA, T ^{[1
]}

MOGI, K ^{[1
]}

HIRAKI, A ^{[1
]}

NAKASHIMA, S ^{[1
]}

MITSUISHI, A ^{[1
]}

机构：

[1] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN

来源：

SOLID STATE COMMUNICATIONS | 1981年 / 40卷 / 02期

关键词：

D O I：

10.1016/0038-1098(81)90158-7

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：161 / 164

页数：4

共 10 条

[1] INFRARED VIBRATIONAL-SPECTRA OF RF-SPUTTERED HYDROGENATED AMORPHOUS SILICON [J].

FREEMAN, EC ;

PAUL, W .

PHYSICAL REVIEW B, 1978, 18 (08) :4288-4300

[2] LOW-TEMPERATURE CRYSTALLIZATION OF DOPED A-SI-H ALLOYS [J].

HAMASAKI, T ;

KURATA, H ;

HIROSE, M ;

OSAKA, Y .

APPLIED PHYSICS LETTERS, 1980, 37 (12) :1084-1086

[3] SPONTANEOUS INCLUSION OF OXYGEN IN SPUTTER-DEPOSITED AMORPHOUS-SILICON DURING AND AFTER FABRICATION [J].

IMURA, T ;

USHITA, K ;

HIRAKI, A .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (02) :L65-L68

[4] CHARACTERIZATION OF HYDROGENATED AMORPHOUS-SILICON - SOME BEHAVIORS OF HYDROGEN AND IMPURITIES STUDIED BY FILM CHARACTERIZATION TECHNIQUES [J].

IMURA, T ;

KUBOTA, K ;

USHITA, K ;

HIRAKI, A .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 :99-103

[5]

KAMIYA K, UNPUBLISHED

[6] CHARACTERIZATION OF AMORPHOUS-SILICON FILMS BY RUTHERFORD BACKSCATTERING SPECTROMETRY [J].

KUBOTA, K ;

IMURA, T ;

IWAMI, M ;

HIRAKI, A ;

SATOU, M ;

FUJIMOTO, F ;

HAMAKAWA, Y ;

MINOMURA, S ;

TANAKA, K .

NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3) :211-215

[7] STRUCTURAL INTERPRETATION OF THE VIBRATIONAL-SPECTRA OF A-SI-H ALLOYS [J].

LUCOVSKY, G ;

NEMANICH, RJ ;

KNIGHTS, JC .

PHYSICAL REVIEW B, 1979, 19 (04) :2064-2073

[8] CONTROLLED HYDROGENATION OF AMORPHOUS SILICON AT LOW-TEMPERATURES [J].

STEIN, HJ ;

PEERCY, PS .

APPLIED PHYSICS LETTERS, 1979, 34 (09) :604-606

[9]

TANAKA K, 12TH P C SOL STAT DE

[10] PROPERTIES OF POLYCRYSTALLINE SILICON PREPARED BY CHEMICAL-TRANSPORT IN HYDROGEN PLASMA AT TEMPERATURES BETWEEN 80-DEGREES-C AND 400-DEGREES-C [J].

VEPREK, S ;

IQBAL, Z ;

OSWALD, HR ;

WEBB, AP .

JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1981, 14 (03) :295-308

← 1 →