RETROREFLECTING ELLIPSOMETER FOR MEASURING THE BIREFRINGENCE OF OPTICAL DISK SUBSTRATES

被引：5

作者：

FU, H ^{[1
]}

GOODMAN, T ^{[1
]}

SUGAYA, S ^{[1
]}

ERWIN, JK ^{[1
]}

MANSURIPUR, M ^{[1
]}

机构：

[1] NEC CORP LTD,FUNCT DEVICES RES LABS,KAWASAKI,KANAGAWA 213,JAPAN

来源：

APPLIED OPTICS | 1995年 / 34卷 / 01期

关键词：

D O I：

10.1364/AO.34.000031

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A retroreflecting ellipsometer has been constructed for measuring the birefringence of optical disk substrates. In contrast to conventional ellipsometers with two mechanical arms, this system has only one arm along which both the incident and reflected beams travel. This construction eliminates the mechanical limitations of conventional ellipsometers, thereby permitting normal incidence on the sample. In addition, the single arm is adjustable in two dimensions, with the polar incident angle, theta(inc), varying from 0 degrees to 70 degrees, and the azimuthal incident angle, Phi(inc), varying from 0 degrees to 360 degrees. The condition of normal incidence permits accurate measurement of in-plane birefringence. The adjustability of both theta(inc) and Phi(inc) is necessary for the measurement of possible tilts of the index ellipsoid, and also for the variation of birefringence through the substrate thickness. Measurement results showing the useful features of the equipment are presented. The optics of the hemispherical assembly used for retroreflection as well as for the elimination of undesirable refractions are also studied by use of the ZEMAX lens design program.

引用

页码：31 / 39

页数：9

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