ION INDUCED RE-EMISSION OF NOBLE GAS ATOMS FROM POLYCRYSTALLINE TUNGSTEN .2.

被引:2
作者
ERENTS, K
CARTER, G
机构
[1] Technology Division, Culham Laboratory, Abingdon
关键词
D O I
10.1088/0022-3727/2/5/309
中图分类号
O59 [应用物理学];
学科分类号
摘要
Measurements have been made to obtain the gas sputtering yield as a function of (a) primary ion dose, (b) primary ion energy and (c) secondary ion energy for various inert gas ion types injected into polycrystalline tungsten during secondary ion bombardment. A qualitative model for the gas sputtering process is suggested in which target atom collision cascades are assumed to play an important role.
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页码:711 / &
相关论文
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