ION INDUCED RE-EMISSION OF NOBLE GAS ATOMS FROM POLYCRYSTALLINE TUNGSTEN .2.

被引：2

作者：

ERENTS, K

CARTER, G

机构：

[1] Technology Division, Culham Laboratory, Abingdon

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1969年 / 2卷 / 05期

关键词：

D O I：

10.1088/0022-3727/2/5/309

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Measurements have been made to obtain the gas sputtering yield as a function of (a) primary ion dose, (b) primary ion energy and (c) secondary ion energy for various inert gas ion types injected into polycrystalline tungsten during secondary ion bombardment. A qualitative model for the gas sputtering process is suggested in which target atom collision cascades are assumed to play an important role.

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页码：711 / &

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