ROLE OF INTERFACE CORRELATION IN LIGHT-SCATTERING BY A MULTILAYER

被引：87

作者：

AMRA, C ^{[1
]}

APFEL, JH ^{[1
]}

PELLETIER, E ^{[1
]}

机构：

[1] OCLI, SANTA ROSA, CA 95407 USA

来源：

APPLIED OPTICS | 1992年 / 31卷 / 16期

关键词：

LIGHT SCATTERING; OPTICAL COATINGS; CORRELATION; RESIDUAL ROUGHNESS;

D O I：

10.1364/AO.31.003134

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Four industries prepared optical coatings with a common design that permits an easy determination of cross-correlation laws between the rough interfaces in the stack. Different pairs of materials and deposition processes were used. After clarifying the differences between scalar and vector theories of light scattering caused by rough interfaces in optical multilayers, we compare the experimental values with both theories. Factors such as variations of correlation with spatial frequency, residual roughness, and slight errors in the design are taken into account for comparison with the vector theory of angular scattering. Correlation of the interface roughnesses is found to be high for practically all coatings. However, at low scatter-loss levels, scattering by localized defects in the coatings appears to dominate over the scattering caused by rough interfaces.

引用

页码：3134 / 3151

页数：18

共 22 条

[1] CALCULATION AND MEASUREMENT OF SCATTERING FOR INVESTIGATION OF MICROROUGHNESS IN OPTICAL COATINGS [J].

AMRA, C .

JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE, 1990, 21 (03) :83-98

[2] DESCRIPTION OF A SCATTERING APPARATUS - APPLICATION TO THE PROBLEMS OF CHARACTERIZATION OF OPAQUE SURFACES [J].

AMRA, C ;

GREZESBESSET, C ;

ROCHE, P ;

PELLETIER, E .

APPLIED OPTICS, 1989, 28 (14) :2723-2730

[3]

Amra C., 1989, Proceedings of the SPIE - The International Society for Optical Engineering, V1009, P82, DOI 10.1117/12.949159

[4] THEORY AND APPLICATION OF ANTISCATTERING SINGLE LAYERS - ANTISCATTERING ANTIREFLECTION COATINGS [J].

AMRA, C ;

ALBRAND, G ;

ROCHE, P .

APPLIED OPTICS, 1986, 25 (16) :2695-2702

[5]

AMRA C, 1990, P SOC PHOTO-OPT INST, V1270, P12

[6]

AMRA C, 1987, LASER INDUCED DAMAGE, V756, P265

[7]

AMRA C, 1986, LASER INDUCED DAMAGE, V752, P594

[8]

Bennett J.M., 1989, INTRO SURFACE ROUGHN

[9] COMPARISON OF THE PROPERTIES OF TITANIUM-DIOXIDE FILMS PREPARED BY VARIOUS TECHNIQUES [J].

BENNETT, JM ;

PELLETIER, E ;

ALBRAND, G ;

BORGOGNO, JP ;

LAZARIDES, B ;

CARNIGLIA, CK ;

SCHMELL, RA ;

ALLEN, TH ;

TUTTLEHART, T ;

GUENTHER, KH ;

SAXER, A .

APPLIED OPTICS, 1989, 28 (16) :3303-3317

[10] AUTOMATIC-DETERMINATION OF THE OPTICAL-CONSTANTS OF INHOMOGENEOUS THIN-FILMS [J].

BORGOGNO, JP ;

LAZARIDES, B ;

PELLETIER, E .

APPLIED OPTICS, 1982, 21 (22) :4020-4029

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