ELECTRONIC LIMITATIONS IN PHASE METERS FOR HETERODYNE INTERFEROMETRY

被引：50

作者：

OLDHAM, NM ^{[1
]}

KRAMAR, JA ^{[1
]}

HETRICK, PS ^{[1
]}

TEAGUE, EC ^{[1
]}

机构：

[1] US DEPT COMMERCE,NATL INST STAND & TECHNOL,TECHNOL ADM,METROL BLDG,ROOM A117,BLDG 220,GAITHERSBURG,MD 20899

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1993年 / 15卷 / 03期

关键词：

PHASE METERS; HETERODYNE INTERFEROMETRY;

D O I：

10.1016/0141-6359(93)90005-U

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Limitations imposed by the phase meters used in heterodyne interferometers are evaluated. These instruments measure the phase relationship between electrical signals generated by the heterodyning process, allowing the interferometers to resolve fractions of an optical fringe. Measurements indicate that the phase meters used in currently available heterodyne interferometers probably limit achievable accuracy to a greater extent than barriers imposed by the optics. We show that a new class of time interval counters offers a means of greatly improving accuracy in these instruments.

引用

页码：173 / 179

页数：7

共 13 条

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