KINETICS OF WSI2 FORMATION IN THIN-FILM SYSTEM W-PTSI-SI

[1] ANDERSON RM, 1972, 30TH P ANN M EL MICR, P518

[2] Kinetics of phase change I - General theory [J]. JOURNAL OF CHEMICAL PHYSICS, 1939, 7 (12) : 1103 - 1112

[3] Christian J. W., 2002, THEORY TRANSFORMATIO, V3rd

[4] GAGE PR, 1965, T METALL SOC AIME, V233, P832

[5] HASHIMOT.N, 1967, T METALL SOC AIME, V239, P1109

[6] KOCH FB, 1970, OCT EL SOC M ATL CIT

[7] LEPSELTER MP, 1969, OHMIC CONTACTS SEMIC

[8] LOCKER LD, PRIVATE COMMUNICATIO

[9] STABILITY OF SOLID PHASES IN THE TERNARY SYSTEMS OF SILICON AND CARBON WITH RHENIUM AND THE 6 PLATINUM METALS [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1962, 45 (06) : 268 - 273

[10] THERMAL-STABILITY OF THIN PTSI FILMS ON SILICON SUBSTRATES [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (09) : 3637 - +

[1] ANDERSON RM, 1972, 30TH P ANN M EL MICR, P518

[2] Kinetics of phase change I - General theory [J]. JOURNAL OF CHEMICAL PHYSICS, 1939, 7 (12) : 1103 - 1112

[3] Christian J. W., 2002, THEORY TRANSFORMATIO, V3rd

[4] GAGE PR, 1965, T METALL SOC AIME, V233, P832

[5] HASHIMOT.N, 1967, T METALL SOC AIME, V239, P1109

[6] KOCH FB, 1970, OCT EL SOC M ATL CIT

[7] LEPSELTER MP, 1969, OHMIC CONTACTS SEMIC

[8] LOCKER LD, PRIVATE COMMUNICATIO

[9] STABILITY OF SOLID PHASES IN THE TERNARY SYSTEMS OF SILICON AND CARBON WITH RHENIUM AND THE 6 PLATINUM METALS [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1962, 45 (06) : 268 - 273

[10] THERMAL-STABILITY OF THIN PTSI FILMS ON SILICON SUBSTRATES [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (09) : 3637 - +