A CONSIDERATION OF SURFACE-ROUGHNESS MEASUREMENT BY OPTICAL METHOD

被引：13

作者：

SHIRAISHI, M

机构：

[1] Ibaraki Univ, Hitachi, Jpn, Ibaraki Univ, Hitachi, Jpn

来源：

JOURNAL OF ENGINEERING FOR INDUSTRY-TRANSACTIONS OF THE ASME | 1987年 / 109卷 / 02期

关键词：

COMPUTER SIMULATION - OPTICAL INSTRUMENTS;

D O I：

10.1115/1.3187097

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

A modified reflection theory based on Beckmann and Spizzichino is described which evaluates the surface roughness in connection with R//m//a//x roughness value. Computer simulations due to this theory are relatively in good agreement with the experiments. Further, the simulation results suggest that the reflection characteristics can be freely changed to some extent by varying the incidence and acceptance angles of light. Also, the proposed measuring system is easily applicable to the real-time detection of turned surfaces without affecting its working accuracy.

引用

页码：100 / 105

页数：6