SILICON HYDRIDE ETCH PRODUCTS FROM THE REACTION OF ATOMIC-HYDROGEN WITH SI(100)

被引：232

作者：

GATES, SM

KUNZ, RR

GREENLIEF, CM

机构：

来源：

SURFACE SCIENCE | 1989年 / 207卷 / 2-3期

关键词：

D O I：

10.1016/0039-6028(89)90129-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：364 / 384

页数：21

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[1] ANDERSON HH, 1981, TOPICS APPLIED PHYSI, V47
[2] ELECTRON-IMPACT IONIZATION AND DISSOCIATIVE IONIZATION OF THE CD3 AND CD2 FREE-RADICALS
BAIOCCHI, FA
WETZEL, RC
FREUND, RS
[J]. PHYSICAL REVIEW LETTERS, 1984, 53 (08) : 771 - 774
[3] MONO-HYDRIDE AND DIHYDRIDE PHASES ON SILICON SURFACES - A COMPARATIVE-STUDY BY EELS AND UPS
BUTZ, R
OELLIG, EM
IBACH, H
WAGNER, H
[J]. SURFACE SCIENCE, 1984, 147 (2-3) : 343 - 348
[4] HYDROGEN CHEMISORPTION ON SI(111)-(7X7) AND SI(111)-(1X1) SURFACES - A COMPARATIVE INFRARED STUDY
CHABAL, YJ
HIGASHI, GS
CHRISTMAN, SB
[J]. PHYSICAL REVIEW B, 1983, 28 (08): : 4472 - 4479
[5] NEW ORDERED STRUCTURE FOR THE H-SATURATED SI(100) SURFACE - THE (3X1) PHASE
CHABAL, YJ
RAGHAVACHARI, K
[J]. PHYSICAL REVIEW LETTERS, 1985, 54 (10) : 1055 - 1058
[6] SURFACE INFRARED STUDY OF SI(100)-(2X1)H
CHABAL, YJ
RAGHAVACHARI, K
[J]. PHYSICAL REVIEW LETTERS, 1984, 53 (03) : 282 - 285
[7] CHEMISORPTION OF HYDROGEN ON THE SI(100) SURFACE - MONOHYDRIDE AND DIHYDRIDE PHASES
CIRACI, S
BUTZ, R
OELLIG, EM
WAGNER, H
[J]. PHYSICAL REVIEW B, 1984, 30 (02): : 711 - 720
[8] SI(001) SURFACE STUDIES USING HIGH-ENERGY ION-SCATTERING
FELDMAN, LC
SILVERMAN, PJ
STENSGAARD, I
[J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3): : 589 - 593
[9] ENERGY-TRANSFER AND CATALYTIC DECOMPOSITION OF AMMONIA ON RHENIUM AT HIGH-TEMPERATURES
FONER, SN
HUDSON, RL
[J]. JOURNAL OF CHEMICAL PHYSICS, 1984, 80 (09) : 4013 - 4019
[10] ADSORPTION STATES AND ADSORPTION-KINETICS OF ATOMIC-HYDROGEN ON SILICON CRYSTAL-SURFACES
FROITZHEIM, H
KOHLER, U
LAMMERING, H
[J]. SURFACE SCIENCE, 1985, 149 (2-3) : 537 - 557