AQUEOUS OZONE DETECTOR USING IN2O3 THIN-FILM SEMICONDUCTOR GAS SENSOR

被引：33

作者：

TAKADA, T ^{[1
]}

TANJOU, H ^{[1
]}

SAITO, T ^{[1
]}

HARADA, K ^{[1
]}

机构：

[1] FUJI ELECT CO LTD,HINO,TOKYO 191,JAPAN

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1995年 / 25卷 / 1-3期

关键词：

AQUEOUS OZONE DETECTOR; GAS SENSORS; INDIUM OXIDE; THIN-FILM SENSORS;

D O I：

10.1016/0925-4005(95)85119-4

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A detector for continuous determination of a trace amount of aqueous ozone, utilizing an ozone-extraction process from liquid (water) into the gas phase and an In2O3 thin-film semiconductor ozone gas sensor, has been developed. It has many advantages, including high sensitivity to aqueous ozone and high aqueous ozone selectivity in the presence of various kinds of interfering compounds in water. It is able to detect 0.5 ppb of aqueous ozone with a sufficient response. The response to 1 ppm of free chlorine in water is smaller than that to 10 ppb of aqueous ozone. It is revealed that the high sensitivity and the high selectivity are attributed in considerable part to the higher extraction rate of ozone from water into the gas phase than those of other compounds in water. This detector is somewhat affected by a change in water temperature. The water-temperature correction has been studied. A precise determination of aqueous ozone has been performed in the water-temperature range 0-40 degrees C with an improved detector equipped with the correction process.

引用

页码：548 / 551

页数：4

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