TITANIUM IN-DIFFUSED LINBO3 OPTICAL-WAVEGUIDE FABRICATION

被引：13

作者：

STULZ, LW

机构：

[1] Bell Laboratories, Crawford Hill Laboratory, Holmdel, New Jersey

来源：

APPLIED OPTICS | 1979年 / 18卷 / 12期

关键词：

D O I：

10.1364/AO.18.002041

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Techniques used to fabricate titanium in-diffused optical waveguide devices in LiNbO3 are described. The processes described include photolithography, precision mask orientation and registration, metal diffusion, waveguide end polishing, and crystal cleaving. © 1979 Optical Society of America.

引用

页码：2041 / 2044

页数：4

共 6 条

[1] FLIP-CHIP APPROACH TO ENDFIRE COUPLING BETWEEN SINGLE-MODE OPTICAL FIBERS AND CHANNEL WAVEGUIDES
HSU, HP
MILTON, AF
[J]. ELECTRONICS LETTERS, 1976, 12 (16) : 404 - 405
[2] EFFICIENT STRIP-WAVEGUIDE MODULATOR
KAMINOW, IP
STULZ, LW
TURNER, EH
[J]. APPLIED PHYSICS LETTERS, 1975, 27 (10) : 555 - 557
[3] LOSS IN CLEAVED TI-DIFFUSED LINBO3 WAVEGUIDES
KAMINOW, IP
STULZ, LW
[J]. APPLIED PHYSICS LETTERS, 1978, 33 (01) : 62 - 64
[4] INTEGRATED BISTABLE OPTICAL-DEVICES
SMITH, PW
KAMINOW, IP
MALONEY, PJ
STULZ, LW
[J]. APPLIED PHYSICS LETTERS, 1978, 33 (01) : 24 - 26
[5] SELF-CONTAINED INTEGRATED BISTABLE OPTICAL-DEVICES
SMITH, PW
KAMINOW, IP
MALONEY, PJ
STULZ, LW
[J]. APPLIED PHYSICS LETTERS, 1979, 34 (01) : 62 - 65
[6] TURNER EH, UNPUBLISHED

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