CRITICAL ISSUES FOR SINGLE-CHAMBER MANUFACTURING - THE ROLE OF LASER TECHNOLOGY

被引：6

作者：

EHRLICH, DJ

机构：

[1] Lincoln Laboratory, Massachusetts Institute of Technology, Lexington

来源：

APPLIED SURFACE SCIENCE | 1993年 / 69卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(93)90491-S

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Some critical issues confronting single-chamber, in situ processing are reviewed with an eye toward the role laser technologies are likely to play in enabling this emerging trend in microfabrication.

引用

页码：115 / 120

页数：6

共 7 条

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PORTEUS, JO ;

FAITH, WN ;

FRANCK, JB .

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[2] STEREO LASER MICROMACHINING OF SILICON [J].

BLOOMSTEIN, TM ;

EHRLICH, DJ .

APPLIED PHYSICS LETTERS, 1992, 61 (06) :708-710

[3]

Ehrlich D.J., 1989, LASER MICROFABRICATI

[4]

EHRLICH DJ, IN PRESS NEW PHOTORE

[5]

HORN MW, 1990, J VAC SCI TECHNOL B, V8, P1463

[6]

HORN MW, 1990, J VAC SCI TECHNOL B, V8, P1980

[7] EFFICIENT PULSED LASER REMOVAL OF 0.2-MU M SIZED PARTICLES FROM A SOLID-SURFACE [J].

ZAPKA, W ;

ZIEMLICH, W ;

TAM, AC .

APPLIED PHYSICS LETTERS, 1991, 58 (20) :2217-2219

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