AUGER-ELECTRON SPECTROSCOPY APPLICATIONS OF A NEW INTEGRAL FIELD-EMISSION GUN WITH A SMALL SPOT SIZE

被引：14

作者：

TODD, G ^{[1
]}

POPPA, H ^{[1
]}

VENEKLASEN, LH ^{[1
]}

机构：

[1] ETEC CORP,HAYWARD,CA 94545

来源：

THIN SOLID FILMS | 1979年 / 57卷 / 02期

基金：

美国国家航空航天局;

关键词：

D O I：

10.1016/0040-6090(79)90151-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An advanced configuration for scanning Auger microscopy is described. Results are presented to demonstrate the ability to form small probes at low primary energy, to detect the Auger signal with a high signal-to-noise ratio, to determine elemental distributions in low Z materials with a good spatial resolution and to analyze small particles. © 1979.

引用

页码：213 / 219

页数：7

共 5 条

[1] SPATIAL DISTRIBUTION OF BACKSCATTERED ELECTRONS IN SCANNING ELECTRON-MICROSCOPE AND ELECTRON-MICROPROBE [J].