HOMOGENIZATION OF TANTALUM PENTOXIDE REFERENCE MATERIALS AND THE ESTABLISHMENT OF A REFERENCE-STANDARD FOR SPUTTERING FLUXES AND FOR CROSS-SECTION MEASUREMENTS IN NUCLEAR INSTRUMENTS

被引：5

作者：

SEAH, MP

HOLBOURN, MW

DAVIES, JA

ORTEGA, C

机构：

[1] MCMASTER UNIV,DEPT ENGN PHYS,HAMILTON L8S 4M1,ONTARIO,CANADA

[2] UNIV PARIS 07,ECOLE NORMALE SUPER,PHYS SOLIDES GRP,TOUR 23,2 PL JUSSIEU,F-75251 PARIS 05,FRANCE

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574900

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1988 / 1993

页数：6

共 18 条

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