NARROWING SPUTTERED NANOPARTICLE SIZE DISTRIBUTIONS

By adjusting the sputtering rate and gas pressure, it is possible to form nanoparticles of different sizes, phases, and materials. We have investigated the spatial distribution of sputtered particle formation using a vertical, linear arrangement of substrates. Collecting the particles soon after they are formed, before they have time to grow and agglomerate, allows one to obtain a narrow size distribution. In the case of molybdenum, a narrow distribution of cubic particles is formed at relatively large distances (8 cm) from the source. These cubic particles collide and self-assemble in the vapor into arrays of larger cubic particles. The particle size histograms are fitted to lognormal distribution functions. How supersaturation occurs is discussed qualitatively as a function of the distance from the substrate, sputtering rate, and the mean free path in the vapor. This method of nanocrystalline particle formation has potential use in magnetic and opto-electronic (quantum dot) applications, where a narrow size distribution is required.