CRYSTAL-GROWTH OF TITANIUM NITRIDE BY CHEMICAL VAPOR-DEPOSITION

被引:76
作者
KATO, A [1 ]
TAMARI, N [1 ]
机构
[1] KYUSHU UNIV,FAC ENGN,DEPT APPL CHEM,FUKUOKA,JAPAN
关键词
D O I
10.1016/0022-0248(75)90048-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:55 / 60
页数:6
相关论文
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