Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD

被引：50

作者：

Buršíková, V. ^{[1
]}

Navrátil, V. ^{[2
]}

Zajíčková, L. ^{[1
]}

Janča, J. ^{[1
]}

机构：

[1] Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 611 37 Brno, Czech Republic

[2] Department of Physics, Faculty of Education, Masaryk University, Porici 7, 603 00 Brno, Czech Republic

来源：

Materials Science and Engineering: A | 2002年 / 324卷 / 1-2期

关键词：

The authors would like to thank Prof. J. Vlček and M. Kormunda from University of West Bohemia for the depth sensing indentation tests. The present work was supported by the Ministry of Education of the Czech Republic; contracts J07/98:143100003; ME301(2000); by the Grant Agency of the Czech Republic; contract 202/00/P037 and by the project NATO SfP 972379;

D O I：

10.1016/S0921-5093(01)01320-X

中图分类号：

学科分类号：

摘要：

引用

页码：251 / 254