Parameters and equilibrium profiles for large-area surface-wave sustained plasmas

被引：13

作者：

Denysenko, I.B. ^{[1
]}

Gapon, A.V. ^{[1
]}

Azarenkov, N.A. ^{[1
]}

Ostrikov, K.N. ^{[2
,3
,4
,5
,6
]}

Yu, M.Y. ^{[5
]}

机构：

[1] School of Physics and Technology, Kharkiv National University, 4 Svobody Square, 61077 Kharkiv, Ukraine

[2] Department of Electrical Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

[3] Plasma Src. and Applic. Centern, NIE, Nanyang Technological University, 1 Nanyang Walk, 637616 Singapore

[4] Sch. of Chem., Phys. and Earth Sci., Flinders Univ. of South Australia, Adelaide, SA 5001, Australia

[5] Faculty of Physics and Astronomy, Ruhr University, 44780 Bochum, Germany

[6] Sch. of Elec. and Electron. Eng., Nanyang Technological University, 639798 Singapore

来源：

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics | 2002年 / 65卷 / 04期

关键词：

Atmospheric pressure - Bessel functions - Boundary conditions - Computer simulation - Dielectric materials - Electromagnetic waves - Ionization - Plasmas - Semiconductor materials - Surface phenomena;

D O I：

10.1103/PhysRevE.65.046419

中图分类号：

学科分类号：

摘要：

The equilibrium profiles of the plasma parameters of large-area if discharges in a finite-length metal-shielded dielectric cylinder are computed using a two-dimensional fluid code. The rf power is coupled to the plasma through edge-localized surface waves traveling in the azimuthal direction along the plasma edge. It is shown that self-consistent accounting for axial plasma diffusion and radial nonuniformity of the electron temperature can explain the frequently reported deviations of experimentally measured radial density profiles from that of the conventional linear diffusion models. The simulation results are in a good agreement with existing experimental data obtained from surface-wave sustained large-diameter plasmas. © 2002 The American Physical Society.

引用

页码：1 / 046419