Zirconium Dioxide Thin Films Characterized by XPS

被引：84

作者：

Barreca, Davide ^{[1
]}

Battiston, Giovanni A. ^{[2
,2
]}

Tondello, Eugenio ^{[3
]}

Zanella, Pierino ^{[4
]}

机构：

[1] Dipartimento C.I.M.A., CSSRCC-CNR, Università di Padova, Via Loredan, 4, Padova,35131, Italy

[2] I.C.T.I.M.A., Corso Stati Uniti, 4, Padova,35127, Italy

[3] Dipartimento C.I.M.A., CSSRCC-CNR, Università di Padova, Via Loredan, 4, Padova,35131, Italy

[4] I.C.T.I.M.A., Corso Stati Uniti, 4, Padova,35127, Italy

来源：

Surface Science Spectra | 2000年 / 7卷 / 04期

关键词：

Photons - Photoelectrons - Film preparation - X ray photoelectron spectroscopy - Binding energy - Zirconia;

D O I：

10.1116/1.1375573

中图分类号：

学科分类号：

摘要：

In this work we use x-ray photoelectron spectroscopy (XPS) to analyze the principal core levels of a ZrO2 thin film deposited on glass using Zr(OPri)3(dpm) (OPri=isopropoxy; hdpm=2,2,6,6-tetramethyl-3,5-heptanedione) as precursor. Besides the general survey, charge corrected binding energies for the Zr 3d5/2, Zr 3d3/2, O 1s, and C 1s photoelectrons are reported. Deconvolution of the O 1s signal reveals the presence of -OH groups and adsorbed water, whose presence can be related to the air exposure of the film between its preparation and XPS analysis. © 2000 American Vacuum Society.

引用

页码：303 / 309