Design and microfabrication of a hybrid piezoelectric-capacitive tactile sensor

被引：23

作者：

Department of Mechanical and Industrial Engineering, Concordia University, Montreal, Canada ^{[1
]}

机构：

[1] Department of Mechanical and Industrial Engineering, Concordia University, Montreal

来源：

Sens Rev | 2006年 / 3卷 / 186-192期

关键词：

Design; Finite element analysis; Medical equipment; Sensors;

D O I：

10.1108/02602280610675465

中图分类号：

学科分类号：

摘要：

Purpose: To measure the force applied to the tissue, the traditional endoscopic graspers might be equipped with a kind of tactile force sensor. Design/methodology/approach: This paper presents the design, analysis, microfabrication and testing of a piezoelectric and capacitive endoscopic tactile sensor with four teeth. This tactile sensor, which is tooth-like for safe grasping, comprises a Polyvinylidene Fluoride, PVDF film for high sensitivity and is silicon-based for micromachinability. Being a hybrid sensor, employing both capacitive and piezoelectric techniques, it is possible to measure both the static and dynamic loads. Another feature, to be considered in its design, is the ability to detect pulse. The proposed sensor can be integrated with the tip of any current commercial endoscopic grasper without changing its original design. It is shown that using an array of sensor units, the position of the applied load can still be determined. Findings: The static response of the sensor is obtained by applying a static force on the tooth and measuring the change in capacitance between the bottom electrode of the PVDF film and the electrode deposited on the surface of the etched cavity. The dynamic response of the device is determined by applying a sinusoidal force on the tooth of the sensor and measuring the output voltage from the PVDF film. The experimental results are compared with both analytical and finite element results. The sensor exhibits high sensitivity and linearity. Originality/value: Capaciyive and piezoelectic are used to obtain both dynamic,pulse, and static loads. The sensor micromachined so, it can be used in various endoscopic applications. © Emerald Group Publishing Limited.

引用

页码：186 / 192

页数：6

共 14 条

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