Design of a high-accuracy CMM based on multi-lateration techniques

被引:13
作者
Dimensional Metrology Section, Ctr. Basic, Thermal Length Metrol., National Physical Laboratory, Teddington, Middlesex, United Kingdom [1 ]
机构
[1] Dimensional Metrology Section, Ctr. Basic, Thermal Length Metrol., National Physical Laboratory, Teddington, Middlesex
关键词
Calibration; -; Interferometry; Probes;
D O I
10.1016/S0007-8506(07)62972-2
中图分类号
学科分类号
摘要
To address the industrial requirement for the calibration of two-dimensional and three-dimensional artefacts, NPL is developing a new primary CMM with a target uncertainty of 300 nm (k = 1.96) within a cubic working volume of side 600 mm. This CMM is based on the principle of multi-lateration whereby spatial coordinates are determined solely from measurements of displacement of a moving probe relative to a number, probably as many as eight, of fixed measuring stations. A prototype measuring station has been designed, built and tested. The design of the measuring station has been optimized to minimize uncertainties due to beam steering. This paper describes the design of the measuring station, presents an evaluated uncertainty and outlines test results obtained from the prototype system.
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收藏
页码:391 / 394
页数:3
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