Development of the nano-CMM probe based on laser trapping technology

被引：2

作者：

Takaya, Y. ^{[1
]}

Takahashi, S. ^{[1
]}

Miyoshi, T. ^{[1
]}

Saito, K. ^{[2
]}

机构：

[1] Dept. of Mechanical Engineering, Osaka University, Suita, Osaka, Japan

[2] Gumma Polytechnic College, Takasaki, Gumma, Japan

来源：

CIRP Annals - Manufacturing Technology | 1999年 / 48卷 / 01期

关键词：

Interferometers - Laser beams - Microscopes - Probes - Silica - Three dimensional;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The 3D nano-position sensing probe serves as an important technology in the development of the nano-CMM used in microfabrication systems. This paper discusses the laser trapping probe whose principle is based on the dynamic properties of optically trapped particles and the Linnik microscope interferometer. Its potentials as a nano-CMM probe were investigated in fundamental experiments. Single-beam gradient-force optical traps of silica particles in air were successfully demonstrated by using an object lens with N.A. of 0.80. Positional detection accuracy of 30nm was also confirmed through measurements of fringe changes with the shifts of the probe sphere.

引用

页码：421 / 424